Dozens of the terrorists, most of them foreign fighters, were getting out on foot from the last pocket to the agreed camp on the outskirts of the town.
One of the fighters was Sultan al-Shamri, from Saudi Arabia's Ha'el, who said that the militants were suffering from hunger and siege inside the town of Baghouz.
Another militant from Bosnia said that he could not speak Arabic and that he had been fighting with ISIS for six years.
SDF is the main partner of the US-led coalition against ISIS in Syria, says it wants to be certain all civilians have been evacuated from Baghouz before it launches a final assault to capture the area.
Numbers of evacuees have surpassed initial SDF estimates, and there was no sign of the evacuation ending on Tuesday when dozens of trucks ferried more out along dirt track roads.
ISIS used its ultra-radical interpretation of Sunni Islam to justify atrocities including enslavement, mass killings, and draconian punishments including crucifixion.
The evacuees from Baghouz were being taken to a camp for internally displaced people at al-Hol, a town near the Iraqi border.
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